Alio is a world leader in the design and manufacture of precision stages and robotics for the nanometre-precision motion industry. Due to increasing demand for high-precision open-centre stages, Alio is introducing what it claims to be the most precise mechanical-bearing open-centre stages commercially available on the market for atmosphere or UHV environments.
The open-centre XY designs offer from 25mm to over 400mm of travel in each axis, with large apertures, for a wide range of applications that need both nano-repeatability and accuracy of position, as well as extreme flatness and accuracy of motion.
Alio tests and qualifies the stages with a Renishaw ML10 laser interferometer traceable to NIST standards, which provides true data rather than optimistic specification sheet precision.
The Alio 150mm travel standard precision XY stage has X and Y flatness and straightness of linear travel of less than 2um (+/-1um) per axis over 150mm of travel. With Invar scales, the repeatability is less than 150nm (+/-75nm) with an accuracy of less than 1um without laser calibration. With less expensive tape scales on the 150mm XY axes, the uncalibrated accuracy is less than 7um (+/-3.5um) over the range, with less than 0.4um of repeatability, but the XY maintains its precision of flatness and straightness.
If you would like more details about these precision stages, contact Stirling Morley at Micromech ().