Application-oriented research boosts drive technology

When a feeling for markets, competence and teamwork ability come together, the user profits. This is currently being proven by a collaboration between PI (Physik Instrumente) in Karlsruhe and IMMS (Institut fr Mikroelektronik- und Mechatronik-Systeme) and the Department of Mechatronics of Ilmenau University of Technology. The result of their collaboration is a novel nanopositioning system based on the principle of magnetic levitation. The platform levitates on a magnetic field that is generated by six coils and is actively monitored via a 6-D sensor. The magnetic field functions as a drive and actively guides the platform.

The drive and the compact high-resolution measurement system for the six degrees of freedom was developed so that the platform remains passive, in other words no cable connections are necessary. A two-dimensional, optically incremental measurement system records the position with capacitive sensors and serves to control the drive in all axes. In this way, objects can be moved linearly or rotationally on a plane with a previously unattained guiding accuracy.

Dr Rainer Gloess, Head of Advanced Mechatronics at PI, says: "The current, already quite advanced development study "PIMag 6D' positions with a resolution of 10nm. If the system moves on a circular path with a diameter of 100nm, for example, the maximum deviation from the ideal path is only a few nanometres."

The prototype currently has a motion range of 100 × 100 × 0.15mm ³. Trajectory motions can be carried out at an acceleration of up to 2m/s2 and a velocity currently of up to 100mm/s with nanometre precision. The digital motion controller, based on a modular system from PI, can process different geometry files as well as coordinate transformations and offers an optimum basis for a successful new product line.

To find out more about the electromagnetic nanopositioning system please go to www.pi.ws/.