New generation of air-bearing rotary tables launched

To meet maximum payload and form factor requirements for use as a single-axis positioner, as part of an integrated system or even integrated machine, various ABRX rotary axes are available in diameters of 100, 150 and 250 mm, states Aerotech, manufacturer of high-performance motion control and positioning systems.

According to the company: “This makes them particularly suitable for exacting requirements in wafer inspection, high-precision metrology, optical inspection and manufacturing, and MEMS/nanotechnology device production.”

Adds Simon Smith, the company’s European director: “The market demands increasingly stringent performance specifications and, so far, there are very few solutions available that can meet extreme accuracy requirements.” Either the precision of, for example, mechanically mounted rotary tables is not sufficient, or the available solutions are very expensive and determined by a large form factor, which in turn makes it difficult to integrate them into multi-axis movement platforms or machines.