New high-speed, low-power mass spectrometer
Pilz Automation Technology
Posted to News on 11th Mar 2011, 18:06

New high-speed, low-power mass spectrometer

Megatech is introducing the Simplicity Solutions 830 VQM System, an innovative new ultra-fast mass spectrometer for vacuum quality measuring applications. This system is manufactured in the USA by Granville Phillips, a division of Brooks Automation, combining high-performance gas analysis technology with the ability to transform complex measurements into virtual instant usable information.

New high-speed, low-power mass spectrometer

The 830 VQM incorporates the latest state of the art in mass separation, being based on patented electrostatic ion trap technology. It is much smaller than existing RGA instruments and is claimed to be 15 times faster while requiring five times less power than legacy quadruple or mass sector technologies. The electrostatic ion trap accurately represents low mass range gases such as helium and hydrogen with no quadruple zero blast issues, and its ultra-fast performance advantage increases at lower pressures.

This high-quality, high-speed, low-power mass spectrometer has applications mainly in the semiconductor manufacturing industry, but it is also suitable for areas where manufacturing processes are conducted in a vacuum.


Megatech Ltd

Littleton Drive
Huntington
WS12 4TS
UNITED KINGDOM

+44 (0)1543 500044

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